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Author :
Jun-Ho Choy
1 Articles
782
Effects of Ti and TiN Capping Layers on Cobalt-silicided MOS Device Characteristics in Embedded DRAM and Logic
Jong-Chae Kim, Yeong-Cheol Kim, Jun-Ho Choy
J. Korean Ceram. Soc.
2001;38(9):782
Materials Science, Ceramics - Q1
Journal Impact Factor 2.5